To see examples of the typical experimental data correlating Pad Wear (shown as pad thickness change), Pad Condition, Wafer Removal Rate (RR), and within the wafer non-uniformity (WIWNU), as well as the dramatic savings for the semiconductor Fabs from PadProbeTM implementation, please click on the link to the Application Note below:
PadProbe™ for Monitoring and Control of Pad Surface
