Bench Top Dual Mode eCMP Polisher with Multi Sensing Technology
2008 CMP-MIC Conference, March 2008
Vishal Khosla, Michael Vinogradov
Center for Tribology, Campbell, CA 95008
Post-CMP Cleaning Applications: Challenges and Opportunities
2008 CMP-MIC Conference, March 2008
R.K. Singh, D.W. Stockbower and C.R. Wargo
Entegris, Inc.
V. Khosla, M. Vinogradov and N.V. Gitis
Center for Tribology, Campbell, CA 95008
Standardized Functional Tests of Pad Conditioners
Proceedings, 11th International CMP-MIC, Fremont, February 21-23, 2006
Vishal Khosla, Norm Gitis, Suresh Kuiry, Michael Vinogradov
Studies of Advanced Pad Conditioners
Proceedings, 11th International CMP-MIC, Fremont, February 21-23, 2006
Dr. James Chien-Min Sung, Dr. Norm Gitis, Vishal Khosla, Eiichi Nishizawa, Toshio Toganoh
Effect of Temperature on Pad Conditioning Process During Chemical-Mechanical Planarization
Proceedings, 11-th International CMP-MIC, Fremont, February 21-23, 2006
Subrahmanya Mudhivarth, Dr. Norm Gitis, Suresh Kuiry, Michael Vinogradov, Ashok Kumar
Effects of Slurry Flow Rate and Pad
Conditioning Temperature on Dishing, Erosion and Metal Loss Copper CMP Process
(PDF)
Proceeding
of 22nd International VMIC Conference, October 2005
Norm Gitis, Michael Vinogradov, Suresh Kuiry
Center for Tribology, 1715 Dell Ave, Campbell, CA 95008, USA
S. Raghu Mudhivarthi, Ashok Kumar
University of Florida, Tampa, FL 33620 www.eng.usf.edu
Effects of Slurry Flow Rate and Pad
Conditioning Temperature on Dishing, Erosion and Metal Loss Copper CMP (PDF)
Northern California
Chapter AVS User Group Annual Symposia, Abstract Book, CMP, October 2005
Norm Gitis, Michael Vinogradov, Suresh Kuiry
Center for Tribology, 1715 Dell Ave, Campbell, CA 95008, USA
S. Raghu Mudhivarthi, Ashok Kumar
University of Florida, Tampa, FL 33620 www.eng.usf.edu
CMP Consumables Characterization (PDF)
Proceeding of 10th CMP-MIC Conference, February 2005
Norm Gitis, Michael Vinogradov, Suresh Kuiry
Center for Tribology, 1715 Dell Ave, Campbell, CA 95008, USA
Novel Low-Abrasive Slurries And Abrasive-free solutions for copper cMP (PDF)
Proceeding of 10th CMP-MICConference, February 2005
Irina Belov, Joo-Yun Kim, Timothy Moser, Keith Pierce
Praxair Electronics, Indianapolis, IN, USA
Advanced Specification and Tests of CMP Retaining Rings (PDF)
Proceeding
of 9th CMP-MIC
Conference,
February 2004
Norm V. Gitis, Jun Xiao
Center for Tribology, Inc., Campbell CA 95008
Ashok Kumar
University of South Florida, Tampa, FL 33620
Arun K. Sikder
University of South Florida and Center for Tribology, Inc.
Incoming Inspection and Failure Analysis of CMP Consumables at the Semiconductor Fab
(PDF)
Proceeding
of 20th VMIC Conference, September 2003
Michael Vinogradov and Norm V. Gitis
Center for Tribology (CETR), Inc., Campbell CA 95008
Next-Generation Materials
for CMP Retaining Rings
(PDF)
Rima Moussa, Carmin Quartapella,
Greene, Tweed & Co.
Tribology
Issues in CMP
(PDF)
Semiconductor
FABTECH -18th Edition
N.V. Gitis
Center for Tribology (CETR), Inc. , Campbell CA 95008
Study of slurry selectivity and end point detections in Cu-
CMP process
Proceedings of the Eighth International
CMP-MIC
Conference,
February 19-21 2003, Marina Del Rey, CA
P. B. Zantye, A. K. Sikder, N. Gulati, and Ashok Kumar
Center for Microelectronics Research, University of South Florida
Delamination
studies in Cu-ultra low-k stack
Proceedings of the Eighth International
CMP-MIC
Conference,
February
19-21 2003,Marina Del Rey, CA
A. K. Sikder1, P. Zantye, S. Thagella1, Ashok Kumar
Center for Microelectronics Research, University of South Florida
B. Michael Vinogradov and Norm V. Gitis
Center for Tribology (CETR), Inc., Campbell CA 95008
Characterizing
CMP pad conditioning using diamond abrasives (PDF)
Wet Surface Technology
Timothy Dyer
Cymer (formerly of SpeedFam-IPEC)
Jim Schlueter
SpeedFam-IPEC
Optimization
of tribological properties of silicon dioxide during the chemical mechanical
planarization process
Journal
of ELECTRONIC MATERIALS, Vol.30,No.12,2001
A.K.
Sikder, Frank Giglio, John Wood, Ashok Kumar, and Mark Anthony
University of South Florida.
Quantitative Evaluation of CMP Process and Materials Using a CMP Tester with Multiple Sensors
Proceedings of the Second International Conference on Microelectronics
and Interfaces (ICMI), February 2001, Santa Clara, CA
Dr. Norm Gitis and Michael Vinogradov
Center for Tribology, Inc., Campbell CA 95008
